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Professor helps 'green' manufacturing process

March 09, 2010

A technological breakthrough that will conserve resources in the manufacture of semiconductors has been achieved with help from an Arizona State University engineering professor.

Bert Vermeire worked with Semiconductor Research Corporation and researchers from the University of Arizona to dramatically reduce the amount of water that has long been required for the semiconductor manufacturing process.

Vermeire is an associate professor of research in the School of Electrical, Computer and Energy Engineering, a part of ASU’s Ira A. Fulton School of Engineering.

Use of newly developed electro-chemical residue sensors allow for an improved clean, rinse and dry process that makes semiconductor facilities more sustainable by conserving up to half the amount of water typically used during device fabrication.

Water conservation in semiconductor facilities is becoming a major goal for integrated device manufacturers because inadequate process monitoring of water resources can greatly affect costs for manufacturing facilities.

A wireless version of electro-chemical residue sensors is being developed through a collaboration of the Environmental Metrology Corporation and the ConnectionOne Industry-University Research Center at ASU.

More details are in a news release from Semiconductor Research Corporation.